Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1997-08-11
2000-06-13
Morse, Gregory A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
41422201, 414940, B65G 4907
Patent
active
060741546
ABSTRACT:
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening portion, process portion for processing the substrate housed in a cassette on the cassette table, a transfer arm mechanism for taking out the substrate from the cassette table, transferring it to process units G1 to G5, and returning a processed substrate to the cassette on the cassette table, partition members provided between the transfer arm mechanism and the cassette table, for separating an atmosphere on the side of the transfer arm mechanism from that on the side of the cassette table, a passage formed in the partition member so as to face the opening portion of the cassette on the cassette table, for passing the substrate taken out from the cassette on the cassette table by the transfer arm mechanism and returning the substrate to the cassette on the cassette table, cassette moving mechanisms for moving the opening portion of the cassette on the cassette table closer to the passage or to be farther from the passage, and a cover removing mechanism for detaching the cover from the opening portion or attaching the cover to the opening portion of the cassette.
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Akimoto Masami
Ito Kazuhiko
Kaneda Masatoshi
Matsushita Mitiaki
Matsuyama Yuji
Morse Gregory A.
Tokyo Electron Limited
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