Substrate treatment system

Details Substrate treatment system Substrate treatment system

1997-08-27

1999-08-31

Simmons, David A.

Coating apparatus

Projection or spray type

With hood or offtake for waste material

118300, 118 69, 96244, 96228, 96417, 96234, 96408, 432198, 432201, B05B 128, B01D 4706, B05C 1100, F27B 504

Patent

active

059448946

ABSTRACT:
A substrate treatment system comprises process sections provided with at least either of liquid treatment group units and heat treatment group units, an upper space formed above the process sections in order to supply air to the process sections, a purification section for removing alkaline components from the air to be supplied to the upper spaces to purify the air, temperature/humidity controller communicating with the urification section and the upper spaces to control the temperature and humidity of the air passing through the purification sections, and fans for supplying air to the top spaces from the temperature/humidity controller, lowering the air from the upper spaces into the process sections, and supplying at least some of the air lowering through the process sections to the temperature/humidity controller.

REFERENCES:
Yukio Manabe et al., "The development of Air Purifing Technique by a Nucleation and Condensation Method", Journal of The Society of Powder Technology Japan, vol. 31 No. 6 (1994), pp. 409-415.(With English Abstract).

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