Substrate treatment method, coating treatment apparatus, and...

Details Substrate treatment method, coating treatment apparatus, and... Substrate treatment method, coating treatment apparatus, and...

2011-04-19

2011-04-19

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Projection or spray type

C414S936000, C414S783000, C414S941000, C134S006000, C134S018000

Reexamination Certificate

active

07926441

ABSTRACT:
In the coating treatment apparatus, in a first treatment chamber, the front and rear surfaces of the substrate held by a transfer arm are inverted by a turning mechanism, and a coating solution is applied from a coating nozzle to the rear surface of the substrate. The substrate is transferred into a second treatment chamber, in which the coating solution on the rear surface is heated by a heating unit to cure, thereby forming a coating film on the rear surface of the substrate. The formation of the coating film by the coating treatment apparatus is performed before exposure processing, whereby the rear surface of the substrate can be flat for the exposure processing.

REFERENCES:
patent: 5964954 (1999-10-01), Matsukawa et al.
patent: 6752585 (2004-06-01), Reimer et al.
patent: 2002/0092472 (2002-07-01), Hayashi et al.
patent: 2005/0223980 (2005-10-01), Awamura et al.
patent: 3-52226 (1991-03-01), None

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