Substrate treatment apparatus

Details Substrate treatment apparatus Substrate treatment apparatus

2008-03-06

2011-10-11

Stinson, Frankie L (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

C134S078000, C134S157000, C134S902000, C414S222010

Reexamination Certificate

active

08033288

ABSTRACT:
A substrate treatment apparatus includes a container holder which holds a container for containing multiple substrates vertically stacked in horizontal postures, a substrate treatment section which collectively applies treatment to multiple substrates horizontally stacked in vertical postures, a main conveyance mechanism which conveys multiple substrates horizontally stacked in vertical postures between a substrate delivery position and the substrate treatment section, a carrying in/out mechanism which carries in/out the multiple substrates with respect to the container and changes postures of the multiple substrates between the horizontal postures and the vertical postures, and a sub conveyance mechanism which receives and delivers multiple substrates in vertical postures from and to the carrying in/out mechanism at a transfer position, receives and delivers multiple substrates in vertical postures from and to the main conveyance mechanism at the substrate delivery position, and conveys multiple substrates in vertical postures between the transfer and substrate delivery positions.

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Korean Office Action (Decision to Grant) issued Aug. 3, 2010 in connection with corresponding Korean Patent Application No. 10-2008-0018770.

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