Substrate treatment apparatus

Details Substrate treatment apparatus Substrate treatment apparatus

2008-09-10

2011-10-25

Lowe, Scott (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S222010, C414S940000

Reexamination Certificate

active

08043039

ABSTRACT:
A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.

REFERENCES:
patent: 5562383 (1996-10-01), Iwai et al.
patent: 7578650 (2009-08-01), Aalund et al.
patent: 2002/0182040 (2002-12-01), Kimura et al.
patent: 2006/0072986 (2006-04-01), Perlov et al.
patent: 10-270530 (1998-10-01), None
patent: 2000-124301 (2000-04-01), None
patent: 2004-189361 (2004-07-01), None
patent: 2006-54438 (2006-02-01), None
patent: 2006-273457 (2006-10-01), None
Office Action issued Jun. 7, 2011, in Japanese Patent Application No. 2008-137444.

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