Substrate treatment apparatus

Details Substrate treatment apparatus Substrate treatment apparatus

2011-08-30

2011-08-30

Tadesse, Yewebdar T (Department: 1717)

Coating apparatus

Projection or spray type

With hood or offtake for waste material

C118S052000, C118S612000, C118S319000, C118S320000

Reexamination Certificate

active

08006636

ABSTRACT:
A substrate treatment apparatus of the present invention includes: a holding means for rotatably holding a substrate to be treated; a coating solution supply nozzle for supplying a coating solution onto the front surface of the substrate to be treated held on the holding means; a treatment container with an upper surface open for housing them; an exhaust means for exhausting an atmosphere in the treatment container from the bottom; a multiblade centrifugal fan provided on the inner periphery of the treatment container for flowing airflow on a front surface side of the substrate to the exhaust means; and a controller for controlling the number of rotations of the multiblade centrifugal fan corresponding to the number of rotations of the substrate, wherein the number of rotations of the multiblade centrifugal fan is controlled so that turbulent airflow flowing in a circumferential direction on the front surface of the substrate generated due to the rotation of the substrate is corrected to laminar airflow flowing in a radial direction.

REFERENCES:
patent: 5211753 (1993-05-01), Swain
patent: 02149367 (1990-06-01), None
patent: 4-303919 (1992-10-01), None
patent: 2000-153209 (2000-06-01), None
English Translated Abstract of JP-02149367A, Jun. 1990.

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