Substrate treating apparatus

Details Substrate treating apparatus Substrate treating apparatus

1997-06-03

1999-03-16

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

118316, 134182, 134902, 156345LS, B08B 302

Patent

active

058817506

ABSTRACT:
This invention is directed to a substrate treating apparatus in which a treatment is performed upon a top surface and a bottom surface of a substrate to be carried on a substrate carrying plane inclined at a certain angle to a horizontal plane in a direction normal to a substrate carrying direction. The substrate treating apparatus includes a guide plate provided below a substrate carrying plane along which a bottom surface of the substrate is to be carried; and treating liquid supply means having a first treating liquid supply member for supplying a treating liquid to a clearance defined between the bottom surface of the substrate carrying plane and the guide plate.

REFERENCES:
patent: 3082774 (1963-03-01), Benton et al.
patent: 3776800 (1973-12-01), Goffredo
patent: 3791345 (1974-02-01), McCutcheon
patent: 4359279 (1982-11-01), Popoff
patent: 5524654 (1996-06-01), Nakano

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