Substrate treating apparatus

Details Substrate treating apparatus Substrate treating apparatus

2007-07-17

2007-07-17

Bushey, Scott (Department: 1724)

Gas and liquid contact apparatus

Contact devices

Liquid tank

C261S124000, C134S137000, C134S151000, C134S902000

Reexamination Certificate

active

11043823

ABSTRACT:
A substrate treating apparatus for performing a predetermined treatment of substrates includes a treating tank for storing a treating solution, a holder for holding a plurality of substrates arranged in one direction inside the treating tank, and a bubble generating device for generating bubbles in the treating solution stored in the treating tank. The bubble generating device includes a plurality of cylindrical bodies extending in the one direction and arranged in a direction perpendicular to the one direction. Each of the cylindrical bodies is at least partly formed of a porous member extending in the one direction.

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