Substrate treating apparatus

Details Substrate treating apparatus Substrate treating apparatus

1998-08-10

2000-12-12

Beck, Shrive

Coating apparatus

Projection or spray type

Rotating work

118 52, 118320, 118323, 427240, B05B 1302

Patent

active

061592919

ABSTRACT:
A substrate treating apparatus for treating a substrate in a predetermined substrate treating region. Each holder arm is supported in a proximal end portion thereof by an arm support to be swingable about a pivotal axis. In time of substrate treatment, the arm support is raised by an air cylinder. With the ascent of the arm support, a cam follower attached to a proximal end of the holder arm is guided by a cam groove. The holder arm, while being raised, turns from a vertical standby posture to a horizontal posture for treating the substrate. As a result, a treating device attached to a distal end of the holder arm moves to a treating position. In the treating position, the treating device treats the substrate. The holder arms are maintained in the vertical standby posture when out of use in substrate treatment. Thus, the holder arms require a reduced standby space.

REFERENCES:
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patent: 5324547 (1994-06-01), Ohhashi et al.
patent: 5514215 (1996-05-01), Takamatsu et al.
patent: 5685039 (1997-11-01), Hamada et al.
patent: 5772764 (1998-06-01), Akimoto
patent: 5853812 (1998-12-01), Kawasaki et al.
patent: 5863328 (1999-01-01), Sichmann et al.

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