Substrate-transporting device

Details Substrate-transporting device Substrate-transporting device

2008-01-01

2008-01-01

Rodriguez, Saul (Department: 3652)

Material or article handling

Article reorienting device

Article inverting means

C414S777000, C414S351000, C414S936000, C414S222040

Reexamination Certificate

active

10914143

ABSTRACT:
The present invention relates to a substrate-transporting device, including a base, a substrate carrier unit and a shaft unit mounted between the base and the substrate carrier unit. The shaft unit has a supporting shaft and a shaft base to support and control rotation of the substrate carrier unit. The substrate carrier unit includes a bottom carrier seat connected to the supporting shaft, a plurality of first supporting components mounted on a surface of the bottom carrier seat, a top carrier seat having a plurality of vacuum suction nozzles and a plurality of second supporting components, and at least a retractable component sandwiched between the top carrier seat and the bottom carrier seat. The top carrier seat is used to affix and detect the substrate. The retractable component is capable of adjusting the distance between the top carrier seat and the bottom carrier seat.

REFERENCES:
patent: 4047625 (1977-09-01), Grant
patent: 4538950 (1985-09-01), Shiomi et al.
patent: 4818171 (1989-04-01), Burkholder
patent: 4903717 (1990-02-01), Sumnitsch
patent: 5964568 (1999-10-01), Codatto
patent: 6012192 (2000-01-01), Sawada et al.
patent: 2002/0172585 (2002-11-01), Graf et al.

Affiliated with

Also associated with

Rating

Substrate-transporting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate-transporting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate-transporting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3951662