Substrate transportation method and apparatus

Details Substrate transportation method and apparatus Substrate transportation method and apparatus

2007-05-10

2009-08-04

Bidwell, James R (Department: 3651)

Conveyors: power-driven

Conveyor having impinging fluid to feed, shift or discharge...

C198S689100

Reexamination Certificate

active

07568574

ABSTRACT:
The substrate transportation apparatus10comprises a plurality of transportation rollers22A-22D disposed at a predetermined spacing for transporting the substrate40in response to rotation of the transportation rollers22.Each of the transportation rollers22is generally hollow cylindrical member formed with a plurality of slit nozzles24in the circumference. Alternating rows of the transportation rollers22are designed to blow and suck air to and from the bottom surface of the substrate40under transportation while preventing dust or any other foreign materials from collecting on the bottom surface of the substrate40.

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