Substrate transport device

Details Substrate transport device Substrate transport device

2006-12-26

2009-10-06

Crawford, Gene (Department: 3651)

Conveyors: power-driven

Conveyor section

Load propelled as the reactive means in a linear motor or...

Reexamination Certificate

active

07597186

ABSTRACT:
A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on the rotary wheel. The carrier is disposed in the chamber. The second magnet is disposed on the carrier.

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