Substrate transport apparatus with multiple independently...

Details Substrate transport apparatus with multiple independently... Substrate transport apparatus with multiple independently...

2011-05-24

2011-05-24

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490010, C901S015000

Reexamination Certificate

active

07946800

ABSTRACT:
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.

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