Substrate transport apparatus with dual substrate holders

Details Substrate transport apparatus with dual substrate holders Substrate transport apparatus with dual substrate holders

1995-10-27

1997-07-15

Underwood, Donald W.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414937, 901 15, 7449001, B25J 1802

Patent

active

056477244

ABSTRACT:
A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. The movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions.

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