Substrate transport apparatus and substrate transport method

Details Substrate transport apparatus and substrate transport method Substrate transport apparatus and substrate transport method

2006-03-24

2008-08-05

Underwood, Donald (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

C414S222010, C414S749100

Reexamination Certificate

active

07407363

ABSTRACT:
A substrate transport apparatus includes a first substrate transport robot, a second substrate transport robot and a substrate transfer mechanism. The first substrate transport robot includes an upper hand and a lower hand vertically arranged. The second substrate transport robot includes an upper hand and a lower hand vertically arranged. The substrate transfer mechanism includes an upper hand and a lower hand vertically arranged and a hand driving mechanism adapted to perform hand opening and closing operations to vertically move the upper and lower hands.

REFERENCES:
patent: 5564889 (1996-10-01), Araki
patent: 6722834 (2004-04-01), Tepman
patent: 2002/0094265 (2002-07-01), Momoki
patent: 2002/0150459 (2002-10-01), Fujii et al.

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