Substrate transport apparatus and method, exposure apparatus...

Details Substrate transport apparatus and method, exposure apparatus... Substrate transport apparatus and method, exposure apparatus...

2011-03-01

2011-03-01

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S030000

Reexamination Certificate

active

07898645

ABSTRACT:
A substrate transport apparatus, which transports a substrate that has been exposed with an image of a pattern through a projection optical system and a liquid, comprises a substrate support member that supports the substrate, and a liquid removal mechanism that removes the liquid that has adhered to at least one of the substrate support member and at least a portion of the area of the rear surface of the substrate.

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