Substrate transport apparatus

Details Substrate transport apparatus Substrate transport apparatus

2008-01-08

2008-01-08

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

C414S749100, C414S749500

Reexamination Certificate

active

11135398

ABSTRACT:
A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.

REFERENCES:
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patent: 10-0331157 (2002-03-01), None
patent: 2003-0095109 (2003-12-01), None
patent: 2003-0097286 (2003-12-01), None

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