Substrate transport apparatus

Details Substrate transport apparatus Substrate transport apparatus

2005-11-01

2005-11-01

Underwood, Donald W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490010, C414S744600, C414S806000, C414S810000, C414S939000

Reexamination Certificate

active

06960057

ABSTRACT:
A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end effector to hold the substrate thereon. The end effector is rotatably mounted to the wrist to rotate about the wrist. The rotation of the end effector about the wrist is slaved to the robot transport arm. The robot transport arm is adapted to transport substrates into and out of two general side-by-side orientated substrate holding areas with the drive section being located in only one location relative to the two holding areas.

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