Substrate transferring apparatus and substrate processing appara

Details Substrate transferring apparatus and substrate processing appara Substrate transferring apparatus and substrate processing appara

1998-07-01

2000-11-14

Bartuska, F. J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414941, 901 39, B25J 1510, B65G 4907

Patent

active

061460834

ABSTRACT:
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members each have a pair of outer support segments for supporting an outer periphery of the substrate and a pair of inner support segment provided between the outer support segments.

REFERENCES:
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5374147 (1994-12-01), Hiroki et al.
patent: 5700046 (1997-12-01), Van Doren et al.
patent: 5706930 (1998-01-01), Sahoda et al.

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