Substrate transferring apparatus and substrate processing appara

Material or article handling – Device for emptying portable receptacle – Nongravity type

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Details

414937, 901 16, B65G 4907

Patent

active

061168416

ABSTRACT:
A substrate transferring apparatus comprising a substrate support member for supporting a substrate, a base member for holding the substrate support member to be movable horizontally, a lifting member, having one end and another end, for holding the base member at the one end to be rotatable in a horizontal plane, the lifting member being movable upward and downward, and a hold-and-guide member for holding the lifting member at the another end and for guiding the lifting member when the lifting member is moved upward and downward.

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