Substrate transferring apparatus

Details Substrate transferring apparatus Substrate transferring apparatus

2008-09-30

2008-09-30

Bidwell, James R (Department: 3651)

Conveyors: power-driven

Conveyor having impinging fluid to feed, shift or discharge...

C414S676000, C406S088000

Reexamination Certificate

active

11337971

ABSTRACT:
Disclosed herein is a substrate transferring apparatus. The apparatus comprises air injection modules, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus. Thus, even if any one of the air injection modules is damaged, the substrate is prevented from falling because other air injection modules serve to continuously float the substrate. Furthermore, with such a construction, the air injection modules have an advantage in view of maintenance.

REFERENCES:
patent: 3473910 (1969-10-01), Wilde et al.
patent: 5628605 (1997-05-01), Miyoshi
patent: 6736588 (2004-05-01), Baldwin et al.
patent: 6810784 (2004-11-01), Cunningham
patent: 7037063 (2006-05-01), Park et al.
patent: 2005/0063791 (2005-03-01), Chang et sl.

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