Substrate transfer system

Details Substrate transfer system Substrate transfer system

2006-11-21

2006-11-21

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S113000, C700S115000, C700S121000, C700S215000, C700S218000, C700S225000, C700S228000, C700S229000, C414S937000, C414S940000

Reexamination Certificate

active

07139640

ABSTRACT:
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to determine a moving path of the auto guided vehicle, a plurality of process stages at which processes are conducted on a substrate during fabrication of the LCD device, and a host to control the cassette stocker, the auto guided vehicle and the process stages. At least one of the auto guided vehicle and the cassette stocker having a bar code reader.

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Copy of Korean Office Action dated May 9, 2005.

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