Electricity: motive power systems – Positional servo systems – With particular motor control system responsive to the...
Patent
1996-03-08
1998-06-30
Ro, Bentsu
Electricity: motive power systems
Positional servo systems
With particular motor control system responsive to the...
74471XY, 414751, H01L 21027
Patent
active
057739536
ABSTRACT:
A substrate transfer system includes a temporary support for temporarily supporting a substrate, a chuck for holding the substrate by attraction, a stage for supporting the chuck movably in a predetermined direction intersecting a substrate supporting face of the temporary support, a driving system for moving the stage in the predetermined direction, a measuring system for measuring a position of the stage with respect to the predetermined direction, a position servo system for controlling the driving system on the basis of the measurement by the measuring system to thereby servo control the position of the stage with respect to the predetermined direction, and a control system adapted to release the substrate attracting and holding operation of the chuck on the basis of a value corresponding to an amount of operation applied from the position servo system to the driving system. This substrate transfer system assures transfer of a substrate with small stress to the substrate, as well as high speed and high precision transfer of the substrate with a simplified .theta. alignment mechanism.
REFERENCES:
patent: 4664578 (1987-05-01), Kakehi
patent: 4779981 (1988-10-01), Ukaji
patent: 4818169 (1989-04-01), Schram et al.
patent: 4869481 (1989-09-01), Yabu et al.
patent: 5440397 (1995-08-01), Ono et al.
Ukaji Takao
Yamane Yukio
Canon Kabushiki Kaisha
Ro Bentsu
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