Substrate transfer method and substrate transfer cassette

Details Substrate transfer method and substrate transfer cassette Substrate transfer method and substrate transfer cassette

1998-02-19

2000-08-08

Olszewski, Robert P.

Material or article handling

Process

Of loading or unloading load-transporting type vehicle and...

414391, 414392, 414396, 414401, 414940, B65G 6700, H01J 948

Patent

active

060992417

ABSTRACT:
To cope with recent LCD or PDP of larger size, an efficient transfer technology is demanded in manufacturing a larger substrate. It calls for a transfer method for such larger substrate with a less required space, and a substrate transfer cassette enabling such method. A technology is disclosed, which comprises a substrate transfer cassette (50) containing a plurality of substrates, a dolly (55) for loading the substrate transfer cassette (50), and a plurality of cassette holders (70) having a rotating arm (71) which can rotate in the vertical direction, wherein a substrate cassette (50) is transferred from a position near another cassette holder to a position near a destination cassette holder with the dolly (55), raised by the rotating arm (71) on the destination cassette holder (70) from the lower section to the upper section of the dolly (55), and moved from the dolly (55) to the cassette holder (70).

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