Substrate transfer method

Details Substrate transfer method Substrate transfer method

1993-05-14

1995-04-25

Huppert, Michael S.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414937, 414416, 901 9, B65G 6500, G01B 1100

Patent

active

054093481

ABSTRACT:
A method of transferring a substrate with a transfer unit including at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, includes the steps of arranging a position detecting plate on a rest portion of the substrate support member, obtaining position information of the position detecting plate by detecting the position of the position detecting plate with respect to the reference position of the transfer unit by the sensor arm, and transferring the substrate by controlling the position of the transfer unit on the basis of the position information.

REFERENCES:
patent: 4550242 (1985-10-01), Uehana et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4770590 (1989-09-01), Hugues et al.
patent: 4911597 (1990-04-01), Maydan et al.
patent: 4985676 (1991-01-01), Karasawa
patent: 4986729 (1991-01-01), Ohlenbusch
patent: 5044752 (1991-09-01), Thurfjell et al.

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