Substrate transfer method

Details Substrate transfer method Substrate transfer method

1993-06-07

1994-11-29

Underwood, Donald W.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

901 8, B65G 4900

Patent

active

053684370

ABSTRACT:
A method of transferring a substrate between a stage for holding a substrate thereon and a conveying hand for conveying the substrate is disclosed. In one aspect, the method includes the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of an attracting surface of the stage remote from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.

REFERENCES:
patent: 4319864 (1982-03-01), Kaufeldt
patent: 4451197 (1984-05-01), Lange
patent: 4589184 (1986-05-01), Asano et al.
patent: 4785528 (1988-11-01), Soderberg
patent: 4874076 (1989-10-01), Kaplan et al.

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