Substrate transfer apparatus, substrate transfer method, and...

Details Substrate transfer apparatus, substrate transfer method, and... Substrate transfer apparatus, substrate transfer method, and...

2008-03-20

2011-10-04

Mancho, Ronnie (Department: 3664)

Material or article handling

Apparatus for moving material between zones having different...

C414S172000, C414S938000, C198S395000, C250S559330, C250S559290

Reexamination Certificate

active

08029224

ABSTRACT:
A substrate transfer apparatus100includes a substrate transport means4having a transport base5and a plurality of retention arms41a-41efor retaining substrates W, an optical sensor62that is used to define a horizontal optical axis L, an elevator means52for moving the transport base5up and down, and a height detection means54for detecting the height of the transport base5relative to the optical axis L. In accordance with a light-reception
o-light-reception detection result fed from the optical sensor62and the height of the transport base5, a judgment means72aof a control section7judges whether the postures of the retention arms41a-41erelative to the horizontal plane are normal. When the judgment means72ajudges that the postures of the retention arms41a-41erelative to the horizontal plane are abnormal, the control section7exercises control to stop the substrate transport means4.

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Notification of Reasons for Rejection issued on Jan. 20, 2009.
Chinese Office Action issued on Mar. 11, 2011 for Application No. 200810085863.8 w/English language translation.

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