Substrate transfer apparatus, substrate processing apparatus...

Details Substrate transfer apparatus, substrate processing apparatus... Substrate transfer apparatus, substrate processing apparatus...

2006-11-14

2006-11-14

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S217100, C414S940000

Reexamination Certificate

active

07134826

ABSTRACT:
A loader includes a receiving section for receiving a FOUP (front opening unified pod), an opener for transporting substrates out of the FOUP, and a transport robot for transporting the FOUP between the receiving section and the opener. When the opener transports the substrates out of the FOUP, the FOUP is placed on a holding table. The holding table is formed with a notch permitting a transport arm of the transport robot to pass through vertically. Thus, the downward passage of the transport arm with the FOUP held thereon through the notch allows the direct transfer of the FOUP from the transport arm to the holding table. This reduces the time required for the FOUP transfer operation, to provide a high throughput, thereby providing a substrate transfer apparatus capable of achieving a high throughput.

REFERENCES:
patent: 5464313 (1995-11-01), Ohsawa
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6379096 (2002-04-01), Beutler et al.
patent: 6390754 (2002-05-01), Yamaga et al.
patent: 6632068 (2003-10-01), Zinger et al.
patent: 6729823 (2004-05-01), Sakata et al.

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