Substrate transfer apparatus for a vacuum coating system

Details Substrate transfer apparatus for a vacuum coating system Substrate transfer apparatus for a vacuum coating system

1975-11-26

1977-08-16

Sheridan, Robert G.

Railways

Droppings catcher

104135, 104168, 118 49, C23C 1308

Patent

active

040421287

ABSTRACT:
Substrate transfer apparatus for a vacuum coating or processing system of the multiple compartment type, comprising a rectangular platform for carrying substrates to be coated, the platform being moveable through the compartments over and between supporting and guide rollers respectively, and having a gear rack on one side extending in the direction of motion, and driving means for the platform including an electric variable speed d.c. motor connected respectively, through individual one-way running clutches to a plurality of pinion gears, each pinion gear being independently biased for separately meshing with the rack, and limit switches positioned within the compartments and operable by the platform for controlling the electric motor.

REFERENCES:
patent: 847304 (1907-03-01), Allen
patent: 3254778 (1966-06-01), Marland et al.
patent: 3340176 (1967-09-01), Belluso
patent: 3530800 (1970-09-01), Watkins
patent: 3662708 (1972-05-01), Shrader
patent: 3802354 (1974-04-01), Bateson et al.

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