Substrate transfer apparatus, and method of transferring substra

Details Substrate transfer apparatus, and method of transferring substra Substrate transfer apparatus, and method of transferring substra

1995-05-31

1997-07-08

Keenan, James W.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414936, 414937, 901 46, B65G 4907

Patent

active

056453914

ABSTRACT:
In a vertical heat treatment apparatus, a transfer apparatus is used to transfer a wafer between a wafer carrier and a wafer boat. The transfer apparatus comprises a base unit, a fork, three non-contact type sensors, and a main controller. The base unit can move between a first position at which to transfer the wafer to and from the wafer carrier and a second position at which to transfer the wafer to and from the wafer boat. The fork can move back and forth with respect to the base unit, for supporting the wafer. The non-contact type sensors are mounted on the fork, for detecting the position of the wafer. The main controller controls the base unit and the fork in accordance with the data detected by the non-contact type sensors.

REFERENCES:
patent: 4458152 (1984-07-01), Bonora
patent: 4718023 (1988-01-01), Arora
patent: 4744709 (1988-05-01), Hertel et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4941800 (1990-07-01), Koike et al.
patent: 5017082 (1991-05-01), Kobayashi
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5133635 (1992-07-01), Malin et al.
patent: 5350269 (1994-09-01), Azuma et al.
patent: 5405230 (1995-04-01), Ono et al.

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