Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1997-04-07
1998-09-29
Keenan, James W.
Material or article handling
Device for emptying portable receptacle
Nongravity type
901 47, B65G 4907
Patent
active
058138196
ABSTRACT:
In a vertical heat treatment apparatus, a transfer apparatus is used to transfer a wafer between a wafer carrier and a wafer boat. The transfer apparatus comprises a base unit, a fork, three non-contact type sensors, and a main controller. The base unit can move between a first position at which to transfer the wafer to and from the wafer carrier and a second position at which to transfer the wafer to and from the wafer boat. The fork can move back and forth with respect to the base unit, for supporting the wafer. The non-contact type sensors are mounted on the fork, for detecting the position of the wafer. The main controller controls the base unit and the fork in accordance with the data detected by the non-contact type sensors. Another embodiment utilizes a monitor camera in place of the sensors to monitor and display the movement of the fork relative to the wafer.
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Ohsawa Tetu
Tateyama Kiyohisa
Keenan James W.
Tokyo Electron Limited
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