Substrate transfer apparatus and method of driving the same

Details Substrate transfer apparatus and method of driving the same Substrate transfer apparatus and method of driving the same

2007-10-16

2010-10-12

Dillon, Jr., Joe (Department: 3651)

Conveyors: power-driven

Conveyor section

Endless conveyor

C198S604000, C198S465100

Reexamination Certificate

active

07810635

ABSTRACT:
A substrate transfer apparatus and a method of driving the same includes a first guide block and a second guide block, and a single ball screw shaft connected to the first and second guide blocks moves the guide blocks in an axial direction thereof. A first drive unit rotates the ball screw shaft to concurrently move the pair of guide blocks, and a second drive unit connected to the second guide block separately moves the second guide block with respect to the first guide block.

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