Substrate transfer apparatus

Details Substrate transfer apparatus Substrate transfer apparatus

2008-11-26

2009-12-15

Mathews, Alan A (Department: 2851)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C396S612000, C396S615000, C396S624000

Reexamination Certificate

active

07632028

ABSTRACT:
A substrate transfer apparatus that is designed provide an inclined transfer function that improves liquid saving efficiency of a process solution (developing solution) during the transfer of the substrate. The substrate transfer apparatus includes a first transfer unit for transferring a substrate, a second transfer unit spaced apart from an end of the first transfer unit, a third transfer unit disposed between the first and second transfer units and providing an inclined transfer that is capable of saving a developing solution adhered to the substrate during transfer of the substrate, and a transfer controller for controlling an inclined transfer angle and a connection state of the third transfer unit.

REFERENCES:
patent: 5223881 (1993-06-01), Nakagawa et al.
patent: 2002/0191976 (2002-12-01), Nozawa et al.
patent: 2004/0125187 (2004-07-01), Kosaka et al.

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