Substrate transfer apparatus

Details Substrate transfer apparatus Substrate transfer apparatus

2011-06-07

2011-06-07

Underwood, Donald (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490010, C074S490040, C901S015000, C901S021000

Reexamination Certificate

active

07955043

ABSTRACT:
Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present invention includes a multijoint arm whose one end is arranged on a base and the other end is connected to a hand for supporting a substrate, a linear guide for guiding a rectilinear movement of the hand, and a belt driving mechanism for moving the hand along a guide rail of the linear guide. The substrate transfer apparatus having such a configuration supports a load acting on the hand by the multijoint arm and ensures rectilinear transfer performance of the hand by the linear guide. Therefore, since a special mechanism for passing the substrate through a dead point is not required, the configuration is prevented from becoming complicated. Furthermore, since the load does not directly act on the linear guide, high transfer accuracy can be obtained.

REFERENCES:
patent: 6910847 (2005-06-01), Blaufus et al.
patent: 2004/0131461 (2004-07-01), Momoki
patent: 10-296666 (1998-11-01), None
patent: 2005-116665 (2005-04-01), None
patent: 2006-123135 (2006-05-01), None

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