Substrate transfer apparatus

Details Substrate transfer apparatus Substrate transfer apparatus

1991-05-21

1992-09-29

Spar, Robert J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

901 15, 901 25, 414917, 414749, 74479, B25J 1800

Patent

active

051510081

ABSTRACT:
A substrate transfer apparatus includes two transfer arms pivotably arranged on a support table on opposite sides from each other with respect to a center of the support table. Each of the transfer arms includes: a first set of parallel links, a second set of parallel links, and a substrate holding member. The first set of the links is pivotably connected to the second set of the links at one ends thereof. The other ends of the first set of the links are pivotably connected to the support table. The substrate holding member is provided on the other end of the second set of the links. The each of the substrate holding members moves outward from the support table by stretching of the transfer arms and returns to the support table by bending of the transfer arms, and the transfer arms are bent in an opposite direction to each other with respect to the support table.

REFERENCES:
patent: 4293272 (1981-10-01), Jellema
patent: 4749330 (1988-06-01), Hine

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