Substrate testing device and substrate testing method

Details Substrate testing device and substrate testing method Substrate testing device and substrate testing method

2006-11-07

2006-11-07

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S310000

Reexamination Certificate

active

07132671

ABSTRACT:
In a substrate testing device, a testing unit acquires a tested result of a substrate by scanning of an electron beam. An alignment mark detecting unit optically detects an alignment mark on the substrate. A substrate position calculating unit calculates a substrate position within the substrate testing device from a position of the alignment mark. A position aligning unit aligns a position of the tested result with the calculated substrate position.

REFERENCES:
patent: 5910847 (1999-06-01), Van der Werf et al.
patent: 2000-009661 (2000-01-01), None
patent: 2001-0029226 (2001-04-01), None
patent: 2002-0054170 (2002-07-01), None

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