Substrate table with windows, method of measuring a position...

Details Substrate table with windows, method of measuring a position... Substrate table with windows, method of measuring a position...

2005-12-30

2008-12-09

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C356S401000

Reexamination Certificate

active

07463337

ABSTRACT:
A substrate table is provided with an optical system that includes a first window and a second window arranged to allow radiation to pass into an optical arm. At least two mirrors are provided within the optical arm and are arranged to reflect radiation that is passed through the windows. At least two lenses are positioned to receive radiation reflected from the mirrors, wherein the first window is provided with a first alignment mark and the at least two mirrors and at least two lenses are arranged to form an image of the first alignment mark at the second window. A second alignment mark is provided in the second window, or in the substrate table at a location adjacent to the second window.

REFERENCES:
patent: 6768539 (2004-07-01), Gui et al.
patent: 7009708 (2006-03-01), Ames
patent: 2003/0224262 (2003-12-01), Lof et al.
patent: 2005/0133743 (2005-06-01), Schets et al.
patent: 1 420 298 (2004-05-01), None
patent: 1 420 300 (2004-05-01), None
patent: 1 429 188 (2004-06-01), None

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