Substrate support system

Details Substrate support system Substrate support system

2007-07-17

2007-07-17

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

11136885

ABSTRACT:
The present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.

REFERENCES:
patent: 6247579 (2001-06-01), Fujiyama et al.
patent: 6726195 (2004-04-01), Hertz et al.
patent: 6771372 (2004-08-01), Traber
patent: 2004/0036850 (2004-02-01), Tsukamoto et al.
patent: 2005/0266587 (2005-12-01), Nimmakayala et al.

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