Substrate support method

Details Substrate support method Substrate support method

2007-08-21

2007-08-21

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C355S077000

Reexamination Certificate

active

11136886

ABSTRACT:
The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.

REFERENCES:
patent: 6247579 (2001-06-01), Fujiyama et al.
patent: 6726195 (2004-04-01), Hertz et al.
patent: 6762826 (2004-07-01), Tsukamoto et al.
patent: 6771372 (2004-08-01), Traber
patent: 2004/0036850 (2004-02-01), Tsukamoto et al.
patent: 2005/0002010 (2005-01-01), Zaal et al.
patent: 2005/0140962 (2005-06-01), Ottens et al.

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