Substrate support for vacuum coating installation

Coating apparatus – With cutting – punching or tearing of work – Web or sheet work

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Details

C23C 1308

Patent

active

040347044

ABSTRACT:
The support is rotated by a central drive shaft extending into a vacuum chamber in sealed relation thereto, with the central drive shaft having support arms secured thereto and each carrying a respective support head, each support head having several substrate holding plates rotatably mounted thereon and coupled together by a respective gear train for turning about their axes of rotation. Each support head is rotatable by a respective support head drive shaft coupled to the central drive shaft through gearing and carrying a driving gear forming part of the gear train. A respective fixed cam plate is secured to each support head and has a stop cooperable with two oppositely acting pawls mounted on the support head. A respective second cam plate is secured to the driving gear of each gear train, and includes cam portions cooperable with the pawls and cam portions cooperable with an abutment on the associated support head. The pawls are effective alternately to connect each fixed cam plate to the associated second cam plate in accordance with respective opposite directions of rotation of the central drive shaft. The drive moment exerted on each support head drive shaft effects rotation of the support head only when the turning position of the associated support plates corresponds to the direction of rotation of the central drive shaft and, when the direction of rotation of the central drive shaft is reversed, one pawl is disengaged from the stop on the fixed cam plate and the other pawl is engaged with such stop. The second cam plate then rotates with the drive gear to effect turning of the associated support plates and thereafter engages the abutment on the support head for rotation of the support head in the reverse direction, so that each direction of rotation of the support heads is associated with a specific turning position of the associated support plates.

REFERENCES:
patent: 3128205 (1964-04-01), Illsley
patent: 3442572 (1969-05-01), Illsley et al.
patent: 3598083 (1971-08-01), Dort et al.
patent: 3749058 (1973-07-01), Slabaugh
patent: 3783821 (1974-01-01), Dobson et al.
patent: 3858547 (1975-01-01), Bergfelt

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