Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1999-07-21
2000-12-19
Walberg, Teresa
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
219390, 118729, 392418, A21B 100
Patent
active
061630152
ABSTRACT:
A self-aligning mating structure of a substrate support element is connected to an alignment guide. The combination of the self-aligning mating structure and the alignment guide assures that the element properly seats in a complementary mating structure shaped opening in a susceptor as the susceptor is moved into the processing position. An end of the substrate support element opposite to and removed from the self-aligning mating structure is weighted. Thus, the substrate support element remains properly seated in the susceptor throughout the process cycle. The end of the substrate support element opposite to and removed from the self-aligning mating structure also includes a support structure. As the susceptor is lowered from the processing position to the load/unload position, the support structure contacts the bottom of the reaction chamber or other surface in the reaction chamber. As the susceptor is lowered further, the self-aligning mating structure that includes a substrate support tab is positioned above and separated from the susceptor.
REFERENCES:
patent: 5478399 (1995-12-01), Willard
patent: 5820685 (1998-10-01), Kurihara et al.
patent: 5848670 (1998-12-01), Salzman
patent: 5860640 (1999-01-01), Marochl et al.
patent: 5882419 (1999-03-01), Sinha et al.
patent: 5951776 (1999-09-01), Selyutin et al.
Inoue Kazutoshi
Moore Gary M.
Nishikawa Katsuhito
Fuqua Shawntina T.
Gunnison Forrest
Moore Epitaxial Inc.
Walberg Teresa
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