Substrate support device

Details Substrate support device Substrate support device

1997-10-27

1999-04-13

Howell, Daniel W.

Chucks or sockets

Expanding

Jaw structure

269 481, 279145, B23B 31117

Patent

active

058935681

ABSTRACT:
A device for supporting a hollow substrate having two open ends in an aligned orientation, wherein one end of the substrate is engageable with a chuck assembly, including: (a) a base for contacting the other end of the substrate; (b) a post coupled to the base, wherein a section of the post is positioned within the substrate, thereby defining a substrate disposed post section; and (c) a spring apparatus coupled to the substrate disposed post section, wherein the spring apparatus is disposed within the substrate and contacts the substrate interior surface, wherein the spring apparatus is compressed by the substrate during misalignment of the substrate with the device and the compressed spring apparatus springs back to push the substrate to the aligned orientation with the device.

REFERENCES:
patent: 5282888 (1994-02-01), Fukawa et al.
patent: 5320364 (1994-06-01), Mistrater et al.
patent: 5322300 (1994-06-01), Mistrater et al.
patent: 5324049 (1994-06-01), Mistrater et al.
patent: 5328181 (1994-07-01), Mistrater et al.

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