Substrate structure and manufacturing method of the same

Details Substrate structure and manufacturing method of the same Substrate structure and manufacturing method of the same

2008-04-07

2011-12-13

Hailey, Patricia L (Department: 1732)

Catalyst, solid sorbent, or support therefor: product or process

Catalyst or precursor therefor

Inorganic carbon containing

C257S774000, C257SE51040, C977S701000, C977S707000, C977S742000, C977S762000, C977S773000, C977S775000, C977S842000

Reexamination Certificate

active

08076260

ABSTRACT:
After a titanium nitride (TiN) thin film is formed on a silicon substrate, cobalt (Co) fine particles and nickel (Ni) fine particles are deposited in a mixed state on the titanium nitride (TiN) thin film, and CNTs are sequentially grown from the cobalt (Co) fine particles and the nickel fine particles by varying growth conditions.

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