Substrate stress measuring technique

Details Substrate stress measuring technique Substrate stress measuring technique

2009-03-10

2010-12-28

Wells, Kenneth B. (Department: 2816)

Miscellaneous active electrical nonlinear devices, circuits, and

Specific identifiable device, circuit, or system

Integrated structure

C327S566000

Reexamination Certificate

active

07859328

ABSTRACT:
A system, including: a first current mirror having a first current, formed of multiple devices disposed on a substrate, where, when a stress is present, a behavior of a device of the multiple devices forming the first current mirror depends on a direction in which the device of the multiple devices forming the first current mirror is disposed on the substrate; a second current mirror having a second current, formed of multiple devices disposed on the substrate, where, when the stress is present, a behavior of a device of the multiple devices forming the second current mirror depends on a direction in which the device of the multiple devices forming the second current mirror is disposed on the substrate; and a device for measuring a ratio of a difference between the first current and the second current to a sum of the first current and the second current.

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