Substrate storage container

Details Substrate storage container Substrate storage container

2003-08-19

2010-11-02

Yu, Mickey (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S711000, C206S454000

Reexamination Certificate

active

07823730

ABSTRACT:
A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

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