Substrate storage container

Details Substrate storage container Substrate storage container

2003-10-01

2008-11-25

Yu, Mickey (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S711000, C137S508000

Reexamination Certificate

active

07455180

ABSTRACT:
A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

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International Search Report for PCT/JP03/12612 mailed on Jan. 20, 2004.
Supplementary European Search Report completed Sep. 8, 2005.

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