Substrate spin cleaning apparatus

Details Substrate spin cleaning apparatus Substrate spin cleaning apparatus

1996-03-29

1999-01-19

Till, Terrence

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 882, 15102, 73862541, A46B 1304

Patent

active

058601783

ABSTRACT:
A substrate supporting device has a turntable mounted on a rotary shaft for supporting a substrate and spinning the substrate about a vertical axis. The turntable is replaceable by a load measuring device including a load meter mounted on a support bracket having a tube attachable to the rotary shaft. The load meter receives a cleaning brush to measure a pressing load applied therefrom. The load meter has a pressure sensor with an upper surface thereof at an equal level to the surface of the substrate to be placed on the substrate supporting device. Thus, a pressure to be applied to the substrate is measured in the same position as where the substrate is actually treated.

REFERENCES:
patent: 4935981 (1990-06-01), Ohtani et al.
patent: 5345639 (1994-09-01), Tanoue et al.
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5475889 (1995-12-01), Thrasher et al.
patent: 5636401 (1997-06-01), Yonemizu et al.
patent: 5647083 (1997-07-01), Sugimoto et al.

Affiliated with

Also associated with

Rating

Substrate spin cleaning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate spin cleaning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate spin cleaning apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1238615