Substrate spin cleaning apparatus

Details Substrate spin cleaning apparatus Substrate spin cleaning apparatus

1995-09-18

1998-11-03

Graham, Gary K.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 15 77, 15102, A46B 1304

Patent

active

058290877

ABSTRACT:
A cleaning brush is fixed to a cleaner support that is mounted to a rotary element for vertical movement with respect thereto. The rotary element is rotatably supported by a forward portion of a support arm that is pivotable about a vertical axis at the rear of the support arm. A closed space defined by a bellows is connected to air piping having a pressure gauge and a regulator. The regulator is operable in response to variations of pressure resulting from engagement of the cleaning brush with a substrate, to control pressure within said bellows whereby the latter expands and contracts to raise or lower the cleaner support relative to the substrate as required to maintain the pressure in a predetermined range. The aforesaid construction responds fast enough to allow the cleaning brush to follow warping of the substrate with facility, and by so doing clean an entire substrate surface uniformly.

REFERENCES:
patent: 4993096 (1991-02-01), D'Amato
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5475889 (1995-12-01), Thrasher et al.
patent: 5636401 (1997-06-01), Yonemizu et al.
patent: 5685039 (1997-11-01), Hamada et al.

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