Substrate, semiconductor device, method of manufacturing...

Details Substrate, semiconductor device, method of manufacturing... Substrate, semiconductor device, method of manufacturing...

2007-05-22

2007-05-22

Healy, Brian (Department: 2883)

Optical waveguides

With optical coupler

C385S031000, C385S039000, C385S052000, C385S053000, C385S088000

Reexamination Certificate

active

11181116

ABSTRACT:
A substrate for mounting an optical element having a light emission/reception part is disclosed. The substrate includes a base material and an optical waveguide penetrating through the base material. The optical waveguide is positioned opposite to the light emission/reception part. The base material is formed of silicon.

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patent: 2002/0142095 (2002-10-01), Motoyama et al.
patent: 2004 054003 (2004-02-01), None

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