Substrate rotating device

Details Substrate rotating device Substrate rotating device

1996-01-23

1998-01-13

Cuomo, Peter M.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134902, 15302, 248362, 108 22, B08B 302

Patent

active

057068437

ABSTRACT:
A substrate rotating device includes a turn table placed horizontally, a substrate supporting member provided on the turn table, for supporting a substrate with respect to a vertical direction and for regulating the position of the outside periphery of the substrate with respect to a horizontal direction, a driving mechanism causing rotation of the turn table, an opening formed in the turn table, and an evacuating mechanism rotatable as a unit with the turn table, for forcibly evacuating a space between the turn table and the substrate through the opening,

REFERENCES:
patent: 2076784 (1937-04-01), Knipp
patent: 4788994 (1988-12-01), Shinbara
patent: 4871417 (1989-10-01), Nishizawa et al.
patent: 5322079 (1994-06-01), Fukutomi et al.
patent: 5361449 (1994-11-01), Akimoto
patent: 5375291 (1994-12-01), Tateyama et al.
patent: 5452905 (1995-09-01), Bohmer et al.

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